Rotary-Pumped Sputter and Carbon Coater - EMS150R Plus Series

The EMS150R Plus product line is presented in a custom molded, one-piece case. The case houses all the working components. Automatic bleed control ensures optimum vacuum conditions during sputtering.

The EMS150R Plus product line is available in three formats:

• A top-of-the-range sputter coater for non-oxidizing metals (EMS150R S Plus)
• A carbon coater from a cord source suitable for SEM (e.g. EDS and WDS) (EMS150R E Plus)
• Or both in a single easy to use system (EMS150R ES Plus). The deposition inserts can be swapped in seconds and automatically recognizes which insert is in place and displays the appropriate operating settings.

Key Features

• Touchscreen control – fully automatic, rapid data input, simple operation
• Multiple, customer defined coating protocols – ideal for multi-user labs
• Automatic vacuum control, pre-programmable to match process and material – no manual needle valve to adjust
• Vacuum chamber with integral implosion guard
• Easy-to-change, drop-in style specimen stages (rotation stage as standard)
• For sputtering of a wide range of non-oxidizing metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
• Carbon coating – ideal for SEM carbon coating applications (e.g. EDS and WDS)
• Advanced design carbon evaporation gun – for reproducible results, easy to use
• Control of evaporation current profile – ensures consistently reproducible carbon films
• Pump hold – allows the system to be held in continuous pumping mode, awaiting user input before continuing the process
• Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
• Ethernet with local FTP server connection – simple programmer updates
• Three-year warranty

Sputtering (EMS 150 R S Plus and R ES Plus)

0-80mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without “breaking” vacuum and with built-in rest periods).

Carbon Evaporation (EMS 150 R E Plus and R ES Plus)

A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from cord sources. Current pulse for carbon cord: 1-70A;

Optional accessories for EMS150R Plus Series

• Glow discharge (0-80mA operates in DC+ and DC- modes) – for modification of sample surface properties (e.g. hydrophobic to hydrophilic conversion) or for cleaning/removal of contaminating surface residues 
• Film thickness monitor (FTM) - Precise thickness control

<< For detailed information see datasheet >>

Specifications

<< For detailed information see datasheet >>