Turbo-Pumped Sputter and Carbon Coater - EMS150T Plus Series

The EMS 150T Plus product line is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. The ability of the EMS150T Plus to rapidly sputter a wide selection of oxidizing and non-oxidizing metals also makes it an ideal platform for many thin film applications.

The EMS150T Plus product line is available in three formats:

• A high resolution sputter coater, suitable for oxidizing and non-oxidizing metals (EMS150T S Plus)
• A high vacuum carbon coater for SEM and TEM applications (EMS150T E Plus)
• A high resolution sputter coater and high vacuum carbon evaporator (EMS150T ES Plus). The deposition inserts can be swapped in seconds and automatically recognize, which insert is in place and displays the appropriate operating settings.

Key Features

• Touchscreen control – fully automatic, rapid data input, simple operation
• Multiple, customer defined coating schedules can be stored – ideal for multi-user labs
• Automatic vacuum control, which can be preprogrammed to suit the process and material – no manual needle valve to adjust
• Easy-to-change, drop-in style specimen stages (rotation stage as standard)
• For sputtering of a wide range of oxidizing and non-oxidizing metals – suitable for SEM, high resolution FE-SEM and also for many thin film applications
• Fine grain sputtering – for advanced high resolution FE-SEM applications
• High vacuum carbon coating – ideal for SEM and TEM carbon coating applications
• Advanced design carbon rod evaporation gun – simple operation, reproducible results
• Control of evaporation current profile – ensures consistently reproducible carbon films
• Pump hold – allows the system to be held in continuous pumping mode, awaiting user input before continuing the process
• Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum

Processes

Sputtering: 0-150mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without 'breaking' vacuum and with built in cooling periods).

Carbon evaporation: A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or cord sources (optional).

Optional accessories for the EMS150T Plus Series:

• Glow discharge (0-80mA operates in DC+ and DC- modes) – for modification of sample surface properties (e.g. hydrophobic to hydrophilic conversion) or for cleaning/removal of contaminating surface residues 
• Carbon cord evaporation (optional)
  
• Film thickness monitor (FTM) - Precise thickness control
• Metal evaporation and aperture cleaning insert – for thermal evaporation of metals from filaments or boats and cleaning of SEM or TEM apertures.

<< For detailed information see datasheet >>

Specifications

<< For detailed information see datasheet >>