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3D Calibration

(3)
    • Art.Nr: microCal

      m2c calibration software microCal is recommended for a successful 3D calibration. It is developed especially for an automated and easy 3D calibration with m2c calibration structures. By using a marker based calibration technology, it provides improved measurement accuracy and has the following advantages:

      • One Step: Simultaneous processing of lateral and vertical calibration parameters (scale, shear)
      • One Model: For the first time, determination of coupling between vertical and lateral axes is possible
      • One Click: Due to advanced image processing and statistical methods, calibration is extremely efficient and accurate
      • One Reference: Software and calibration structures are suitable for different measurement devices
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        m2c 3D calibration technology helps to turn a SEM with 4 Quadrant BSE detectors (4Q BSD) into a quantitative measurement system. 3D calibration with special m2c reference structures for 4Q BSD SEMs has the following advantages:

        • Simultaneous (one-step) lateral and vertical calibration
        • Calibration is extremely efficient and accurate due to advanced image processing methods
        • Calibration structure has a spherical segment for the signal adjustment of the four backscatter detectors (BSD)

        m2c 3D calibration structures for 4Q BSD SEM systems are available for several scan areas, from 40 μm x 40 μm and up to 80 μm x 80 μm. The complete structure with four elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process

        Starting at

        • Starting at

          m2c 3D SPM calibration technology provides improved measurement accuracy and has the following advantages:

          • One Step: Simultaneous lateral and vertical calibration is provided in one measurement step
          • One Model: For the first time, determination of coupling between vertical and lateral axes is possible
          • One Click: Calibration is extremely efficient and accurate due to advanced image processing methods
          • One Reference: Universal application with one reference structure is possible (SPM, CLSM, SEM or other)

          m2c 3D SPM calibration structures are available for several scan areas, from 20 μm x 20 μm and up to 80 μm x 80 μm. The complete structure with four pyramidal elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process.

          Starting at