The EMS150V ES Plus is denpending on the configuration a high-vacuum system for sputtering of oxidizing metals with ultra-fine grain sizes for high resolution imaging and carbon coating with high purity, amorphous carbon films for TEM grid coating or a combined system for both. Backing pump not included.
The EMS150T Plus Series is on the configuration a high-vacuum system for sputtering, carbon evaporation using rods/cord or both. This high resolution sputter coater is suited for oxidizing and non-oxidizing (noble) metals. The carbon coater is ideal for the production of highly stable carbon films and replicas. Backing pump not included.
The EMS150R Plus Series is depending on the configuration a rotary pumped system for sputtering of non-oxidizing metals (e.g. gold, platinum, silver, palladium), for carbon coating with cord source for SEM (e.g. EDS and WDS) or a combined system for both. Rotary pump not included.