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LUXOR Pt, Platinum Sputter Coater

LU02-001-PT

The smart, innovative and fully automatic LUXORPt sputter coater is routinely used for platinum coatings for high-resolution SEM applications from 50.000x magnification. The standard coating thickness is 2-5 nm, with an average coating time of 5 minutes. The LUXORPt can also be used for gold sputter coating at magnifications of up to 50.000x. The revolutionary upside-down design ensures a clean and safe sputtering process.

Product Details

Description

SEM Coating made smart and easy!

The LUXOR-Pt sputter coater combines innovative technology, high efficiency, and user-friendly operation with excellent coating quality for demanding SEM applications.

  • Robust design – Made in Germany
  • Unique upside-down coating process for a clean and safe sputtering procedure
  • High resolution and thin layers without a turbomolecular pump
  • Optimized intuitive touchscreen operation
  • Suitable for platinum and gold sputter coatings
     

The LUXOR-Pt is an advanced, highly innovative and fully automatic sputter coating system that applies ultra-fine-grained platinum or very fine-grained gold layers with thicknesses from 1 to 100 nm.

The unique A² technology developed by LUXOR generates a controlled plasma in the process gas. In this plasma, ions are accelerated by high voltage and directed precisely onto the platinum or gold target. Finest atom clusters are released from the target and coat the samples with an extremely thin, homogeneous, and conductive layer.

 

TECHNOLOGY

Sputtering is a multidimensional process: vacuum, current and voltage all influence the plasma and coating quality. Keeping plasma constant with a low coating current results in a better and finer coating. By using high tech gas injection technology, LUXOR sputter coaters can operate at very low and extremely stable coating currents. 

Thanks to its advanced design, there is no need for a complex, failure-prone turbomolecular pump; an efficient, robust two-stage rotary vane pump is sufficient for operation.
The coating concept is specifically designed to enhance secondary electron emission, thereby improving the signal quality of microscope detectors and achieving higher image resolution. Reduced beam penetration optimizes spatial resolution and protects delicate samples from damage.

This enables the LUXORPt to coat samples for ultra-high-resolution (FE-)SEM imaging at magnifications up to 1,000,000x, while sample charging is effectively prevented thanks to the ultra-fine grain size. Gold coatings with extremely fine grain sizes are also easily achievable.

 

SUPERIOR COATING QUALITY

Compared to other devices, the LUXOR-Pt produces exceptionally homogeneous platinum and gold coatings, even when using a two-stage rotary vane pump. The A² technology ensures identical, reproducible and long-term stable results.

 

OPTIMIZED USER INTERFACE
The user-friendly, intuitive touchscreen control allows even inexperienced users to quickly start the coating process.

 

OPTIMIZED PROCESSES & EFFICIENCY
With the LUXORPt up to six samples can be processed highly accurate and remarkably fast per run.

 

INCREASED SEM PROTECTION
The unique upside-down coating process prevents the accumulation of loose particles on the sample during coating, ensuring that the SEM remains protected from contamination.

 

ROBUST DESIGN, MADE IN GERMANY
Despite its compact and elegant design, the LUXOR-Pt is an affordable, robust and durable device designed for long-term, intensive use.
Thanks to the unique upside-down design, no cables are required in the lid of the reaction chamber, increasing product safety and reducing the risk of electronic failures.

 

FEATURES AND SPECIFICATIONS

  • Upside-down platinum (argon) or gold coating (air or argon)
  • Maximum sample capacity: 6 samples (Ø 12,5 mm) or 3 samples (Ø 25 mm)
  • Average process time (2–4 nm platinum): approx. 4–5 minutes
  • Average process time (10 nm gold): approx. 5 minutes
  • Additional evacuation and drying function
  • Powerful two-stage rotary vane pump for short process times
  • Evacuation and vacuum drying mode: 7 to 150 Pa (continuously adjustable during process)
  • Adjustable coating thickness: 1 to 100 nm (in 0.1 nm increments)
  • Adjustable process duration: 1 to 600 minutes
  • Process chamber: Borosilicate glass Ø 100 mm x 150 mm height
  • PET implosion protection: Ø 120 mm x 150 mm height
  • Vacuum connection: DN 16 KF
  • Process gas connection: argon or air (max. 60.000 Pa = 0,6 bar)
  • Dimensions: 340 mm x 340 mm x 290 mm (W x D x H)
  • Weight (without pump): 12,5 kg

More Information

More Information
Manufacturer
Luxor
Weight 12.500000

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