The EM-KLEEN in-situ remote plasma cleaner can be used for in-situ cleaning of samples and vacuum chambers for electron microscopes and other types of analytical instruments, such as SEM, FIB, TEM, XPS and SIMS. It can effectively remove hydrocarbon and fluorocarbon contaminations inside the vacuum chamber as well as organic contaminations on the surface of the sample before imaging and analysis.
The Tergeo EM plasma cleaner is a laboratory tabletop plasma system designed for TEM and SEM samples, grids and holders. It can accomodate up to two TEM holders or two 4″ wafers.
The Tergeo plasma system can operate in two cleaning modes: Immersion plasma cleaning for high speed etching and surface modification and remote plasma cleaning for gentle surface contamination removal, such as SEM/TEM sample cleaning. With pulsed operation for extremely delicate samples, plasma with an average RF power of less than 0,5W can be generated.
The EMS GloQube® Plus is a newly developed glow discharge system with two independently operating vacuum chambers. Designed for hydrophilizing surfaces the GloQube® is ideal for the treatment of TEM grids, coated TEM grids or other surfaces with hydrophobic characteristics. Vacuum pump not included.
The Binder TS 716 Pumping Station (drying station) for TEM specimen holders is based on a state-of-the-art, air-cooled, oil-free turbomolecular pumping unit. The pumping station can be upgraded with a Bake-Out Unit and a Cryo-Kit to evacuate your cryo TEM-holders (all optional). It can be equipped with up to six chambers for your TEM specimen holders.
The Plasmacleaner TPS 316 is optimized for gentle cleaning of your specimen and TEM-holders. The plasma source is designed to minimize thermal and sputter effects. This way it is possible to clean even samples which are supported by carbon film coated grids. It has been shown that e-beam-induced contamination in later high-resolution imaging is prevented. An optional SEM-Kit is available for the cleaning of larger samples.