LUXOR Au, Gold Sputter Coater

The LUXOR-Au sputter coater combines innovative technology, high efficiency, and user-friendly operation with excellent coating quality for demanding SEM applications.

• Robust design – Made in Germany
• Unique upside-down coating process for a clean and safe sputtering procedure
• High resolution and thin layers without a turbomolecular pump
• Optimized intuitive touchscreen operation
   

LUXOR-Au is an advanced, highly innovative and fully automated sputter coater that applies a fine-grained gold coating from 1 to 100 nm. 

The unique A² technology developed by LUXOR generates a controlled plasma in the process gas. In this plasma, ions are accelerated by high voltage and directed precisely onto the gold target. Finest atom clusters are released from the target and coat the samples with an extremely thin, homogeneous, and conductive layer.

TECHNOLOGY

Sputtering is a multidimensional process: vacuum, current and voltage all influence the plasma and coating quality. Keeping plasma constant with a low coating current results in a better and finer coating. By using high tech gas injection technology, LUXOR sputter coaters can operate at very low and extremely stable coating currents. 

Thanks to its advanced design, there is no need for a complex, failure-prone turbomolecular pump; an efficient, robust two-stage rotary vane pump is sufficient for operation.
The coating concept is specifically designed to enhance secondary electron emission, thereby improving the signal quality of microscope detectors and achieving higher image resolution. Reduced beam penetration optimizes spatial resolution and protects delicate samples from damage.

With its advanced specifications and features, LUXORAu offers high productivity and is remarkably easy to use.

SUPERIOR COATING QUALITY

Compared to other devices, LUXOR-Au produces more homogeneous and finer-grained gold coatings, even when using a two-stage rotary vane pump. Furthermore, The A² technology ensures identical, reproducible and long-term stable results.

OPTIMIZED USER INTERFACE
The user-friendly, intuitive touchscreen control allows even inexperienced users to quickly start the coating process.

OPTIMIZED PROCESSES & EFFICIENCY

With the LUXOR-Au up to six samples can be processed highly accurate and remarkably fast per run.

INCREASED SEM PROTECTION

The unique upside-down coating process prevents the accumulation of loose particles on the sample during coating, ensuring that the SEM remains protected from contamination.

ROBUST DESIGN, MADE IN GERMANY

Despite its compact and elegant design, the LUXOR-Au is an affordable, robust and durable device designed for long-term, intensive use.
Thanks to the unique upside-down design, no cables are required in the lid of the reaction chamber, increasing product safety and reducing the risk of electronic failures.

FEATURES AND SPECIFICATIONS

• Upside-down gold coating in air or argon plasma
• Maximum sample capacity: 6 samples (Ø 12,5 mm) or 3 samples (Ø 25 mm)
• Average process time (10 nm gold): approx. 5 minutes
• Additional evacuation and drying function
• Powerful 2-stage rotary vane pump for short process times
• Evacuation and vacuum drying mode: 7 to 150 Pa (continuously adjustable during the process)
• Adjustable process duration: 1 to 600 minutes
• Adjustable coating thickness: 1 to 100 nm (in 0,1 nm increments)
• Process chamber: Borosilicate glass Ø 100 mm x 150 mm height
• PET implosion protection: Ø 120 mm x 150 mm height
• Vacuum connection: DN16KF
• Process gas connection: Argon or air (max. 60.000 Pa, 0,6 bar)
• Dimensions: 340 mm x 340 mm x 290 mm (W x L x H)
• Weight (without pump): 11,0 kg