Size Standards

SPM Calibration Specimen, parallel ridges, 150nm nominal Abstand, A1 Lines on Glass, unmounted.

SPM Calibration Specimen, parallel ridges, 700nm nominal Abstand, W-coated Photoresist on Si, mounted on 15mm steel disk.

SEM Calibration Specimen, parallel ridges, 300nm nominal Abstand, Ti lines on silica, mounted.

SEM Calibration Specimen, parallel ridges, 300nm nominal Abstand, Ti lines on silica, unmounted.

This Test Specimen is made of a 5x5mm square of single crystal silicon. It is photo-etched and the squares repeat every 10µm. The dividing lines are 1.9µm wide. A broader etching line is written every 500µm, which is useful in light microscopy.

This Test Specimen is made of a 5x5mm square of single crystal silicon. It is photo-etched and the squares repeat every 10µm. The dividing lines are 1.9µm wide. A broader etching line is written every 500µm, which is useful in light microscopy.

This Test Specimen is made of a 5x5mm square of single crystal silicon. It is photo-etched and the squares repeat every 10µm. The dividing lines are 1.9µm wide. A broader etching line is written every 500µm, which is useful in light microscopy.

This Test Specimen is made of a 5x5mm square of single crystal silicon. It is photo-etched and the squares repeat every 10µm. The dividing lines are 1.9µm wide. A broader etching line is written every 500µm, which is useful in light microscopy.