Plasma Cleaner and Pumping Stations

The Tergeo EM plasma cleaner is a laboratory tabletop plasma system designed for TEM and SEM samples, grids and holders. It can accomodate up to two TEM holders or two 4″ wafers.

The Tergeo plasma system can operate in two cleaning modes: Immersion plasma cleaning for high speed etching and surface modification and remote plasma cleaning for gentle surface contamination removal, such as SEM/TEM sample cleaning. With pulsed operation for extremely delicate samples, plasma with an average RF power of less than 0,5W can be generated.