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MiniQS, Entry Level Sputter Coater


The compact and robust MiniQS is ideal for benchtop/tabletop SEM applications. It features intuitive operation and allows fast and easy coating of SEM samples with gold, gold/palladium or silver using a Magnetron sputtering head.

Product Details




Recommended Applications:

  • Coating for Tabletop/Benchtop SEMs
  • Low and medium Magnifications



  • Preset profiles with single-touch operation
  • Automated operation with minimal user intervention
  • Sputtering with Gold, Gold/Palladium or Silver
  • Coating of samples up to 50mm diameter
  • Hinged sputter head for easy operation
  • Safety interlocks
  • Detachable chamber with implosion guard and top-plate for easy cleaning


This product is for Research Use Only.



The MiniQS meets UK and European (CE) industry standards, including LVD, EMC and RoHS. Vacuum interlocks remove power from deposition sources to prevent users being exposed to high-voltage.



Sputter Target 57mm diameter disk-style 0,1mm thickness. Gold (included). Gold/Palladium, Silver optional available.
Specimen Stage Specimen Stage: 50mm diameter
Vacuum Long pipe - 1,5m KF16 stainless steel (average pump down 32sec)


More Information

More Information
Dimensions 225 mm W x 420 mm D x 480 mm H (total height with coating head open)
Electrical Power 240V
Packing Unit each
Weight 8,7kg